ISO 18516:2019
Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
| Edition date: |
2019-01-14
In Force
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|---|---|
| Available languages: | English |
| Summary: | This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are — the straight edge method; — the narrow line method; — the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects. |
| ICS: | 71.040.40-Chemical analysis |
| CTN: | ISO/TC 201/SC 2 - 54630 |
|
Standards Cancellations |
Anula a ISO 18516:2006 |










