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ISO 14644-9:2022

Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration

Edition date: 2022-05-09
In Force
Available languages: French, English
Summary:

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.

This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm.

The following issues are not considered in this document:

—    requirements for the cleanliness and suitability of surfaces for specific processes;

—    procedures for the cleaning of surfaces;

—    material characteristics;

—    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;

—    selection and use of statistical methods for assessment and testing;

—    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.



Le présent document établit un mode opératoire pour l’évaluation des niveaux de propreté particulaire des surfaces solides, applicables aux salles propres et aux environnements maîtrisés apparentés. Les Annexes A à D fournissent des recommandations relatives aux essais et aux méthodes de mesurage, ainsi que des informations sur les caractéristiques des surfaces.

Le présent document s’applique à toutes les surfaces solides dans les salles propres et environnements maîtrisés apparentés telles que les murs, les plafonds, les sols, les environnements de travail, les outils, les équipements et les produits. Le mode opératoire d’évaluation de la propreté des surfaces par la concentration de particules (SCP) se limite à des tailles de particules comprises entre 0,05 µm et 500 µm.

Le présent document n’aborde pas les points suivants:

—    les exigences pour la propreté et l’adéquation des surfaces à des processus spécifiques;

—    les modes opératoires de nettoyage des surfaces;

—    les caractéristiques des matériaux;

—    les références aux forces de liaison ou aux processus de génération qui sont généralement fonction du temps et qui dépendent du procédé;

—    le choix et l’utilisation de méthodes statistiques pour l’évaluation et les essais;

—    d’autres caractéristiques des particules, telles que la charge électrostatique, les charges ioniques et l’état microbiologique.
ICS: 13.040.35-Cleanrooms and associated controlled environments
CTN: ISO/TC 209 - 54874

Standards Cancellations

Anula a ISO 14644-9:2012

International Equivalence

Identic UNE-EN ISO 14644-9:2022

Normas Conjuntas

Trabajo conjunto ISO 22290:2020

The book in the author's words

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