ISO 14644-12:2018
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
| Fecha edición: |
2018-08-30
En Vigor
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| Idiomas disponibles: | Inglés |
| Resumen: | This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document. |
| ICS: | 13.040.35 - Salas limpias y ambientes controlados asociados |
| CTN: | ISO/TC 209 - 54874 |
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Reemplazo Normas |
Reemplaza a ISO/DIS 14644-12 |










