DIN EN ISO 14644-13:2017-11
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017); German version EN ISO 14644-13:2017
| Edition date: |
2017-11-01
In Force
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|---|---|
| Available languages: | English, German |
| Summary: | This draft standard addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration and surface cleanliness by chemical concentration classes and which techniques should be considered to achieve these specified levels. |
| Keywords: | Areas|Chemicals|Classification systems|Clean rooms|Cleaning|Cleanliness|Clean-room technology|Concentration of particles|Definitions|Degree of purity|Efficiency|Equipment|Evaluations|Impurities|Instructions|Methods|Number of particles|Particle analysis|Particle size|Particles|Purity|Purity test|Surface cleaning|Surfaces|Testing |
| ICS: | 13.040.35-Cleanrooms and associated controlled environments |
| CTN: | |
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International Equivalence |
Identic EN ISO 14644-13:2017 Identic ISO 14644-13:2017 |
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Reemplazo Normas |
Reemplaza a DIN EN ISO 14644-13:2016-03 |










